Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
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Intelligent Nano-measurement as a Driving Force of Metrology and Innovation
Yasuhiro TAKAYA
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Keywords: intelligent nano-measurement, metrology, traceability, optical comb, areal topography, optical measurement
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2015 Volume 81 Issue 10 Pages 911-914

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