Abstract
High precision positioning can be achieved by incorporating positioning control, if accurate modeling of frictional behavior occurring in such linear motion ball bearings is conducted. Final goal in this research is an achievement of ultra-precision positioning by building the accurate frictional model on displacement range under nano-meter level. For that reason, it is necessary to clarify the frictional behavior in minute displacement range. This paper describes that nonlinear spring behavior is shown in range of amplitude of displacement under 100μm. In addition, it indicates difference characteristics when the amplitude of displacement is continuously changed. Moreover, the frictional behavior in minute displacement is influenced by changing very small velocity compared with experimental results of sinusoidal and triangle feed.
