High Accuracy Contouring Control by Quadrant Glitch Compensation for a Feed Drive System Using Eight Grooved Linear Ball Bearing System

Abstract

This paper describes the results of nano-order accuracy contouring control by quadrant glitch compensation for a feed drive system with eight grooved linear ball guide. Three kinds of compensation methods are applied and compared in this study. Those are; 1) repetitive control technique, 2) disturbance observer, and 3) combination of the both. As the results of experiment, the first method decreases the height of quadrant glitch to 0.5 nm by 5 times repetitive compensations. The second method also decrease the height of quadrant glitches to 2 nm, and the third method also can decrease the height to 0.5 nm with repetitive compensation at first time. It is confirmed that the nano-order contouring accuracy can be achieved by combination of the eight grooved linear ball guide and quadrant glitch compensations.