Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Attempts on Pico-Precision Machining via Combination of ELID-Grinding and Polishing
Hitoshi OHMORI, Yunji KIM, Yoshihiro UEHARA, Hiroshi KASUGA, Teruko ONO-KATO, Weimin LIN, Syuhei KUROKAWA, Shinjiro UMEZU
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Keywords: pico-precision machining, ultraprecision grinding, ELID, MRF, CMP, broad-band fabrication
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2019 Volume 85 Issue 4 Pages 304-309

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