Lecture
X-ray Optics and Ultraprecision Machining in Heisei : A Review —Development of Diffraction-Limited X-ray Condenser Mirror as a Cutting-Edge Application of Ultraprecision Machining Methods—
Keywords:
ultraprecision machining,
shape metrology,
X-ray optics,
X-ray mirror,
EEM (Elastic Emission Machining),
MSI (Microstitching Interferometry),
RADSI (Relative Angle Determinable Stitching Interferometry)
2020 Volume 86 Issue 1 Pages 32-38
Details
Article 1st page
