Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Metal Nano-Pattern Stacking Technique Using Nanoimprint Lithography
Jun TANIGUCHI
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Keywords: nanoimprint lithography, mold, printed electronics, metal nano pattern, plasmon memory, stacking structure
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2020 Volume 86 Issue 4 Pages 247-250

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