Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Hyperfine 3D Shape Measurement Using Super Resolution Microscope Technology (WLI/SIM)
Masashi ISHIGE
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Keywords: super resolution microscope, white light interferometry, structured illumination microscopy, nontactile measurement, ISO 25178
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2020 Volume 86 Issue 7 Pages 520-523

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