Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
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Intelligent Nano-Measurement as the Creator of Innovative Manufacturing Technology
Yasuhiro TAKAYA
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Keywords: intelligent nano-measurement, metrology, traceability, geometrical quantity, optical comb, areal topography, angle measurement, photonic measurement, on-machine/in-process measurement, manufacturing metrology
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2021 Volume 87 Issue 10 Pages 797-801

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