Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
High Precision Clamping Technique Using a Water-Film Porous Chuck
Kenichiro YOSHITOMI
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Keywords: wafer thinning, backgrinding, TTV, water film, porous chuck, clamping force, holding layer
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2023 Volume 89 Issue 5 Pages 382-386

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