Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
The Principles of FIB and Serial Sectioning
Tsuyoshi ONISHI
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Keywords: FIB, FIB-SEM, SIM, sputtering, FIB-AD, micro-sampling, LMIS, ICP, plasma, curtaining, segmentation, SE, BSE
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2023 Volume 89 Issue 6 Pages 436-439

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