Trial Design of Profile Measuring Instrument

Abstract

This paper describes the profile measuring instrument that we designed. The character-istics of laser beam with high luminance and good coherency are utilized to this instrument. Profile measurement of the large parts such as turbine blades, teethed wheels, knobs etc. have been reported previously. Therefore, the purpose of this paper is to point out that the profile of small parts are measured by remodeling single lens into optical microscope. In case of measuring the profile of large parts, the precise profile was obtained with simple adjustment. But in this method with microscope system the sizes and forms of profiles are not always obtained precisely so that those experiments were done to investigate the condition that precise profiles can be obtained. As the result of the experiments, it was found that the fine profile can be measured easily only with error by the optical aberations if the optical axis is coincident with the axis of mechanical rotation perfectly.