Abstract
In the interferometric measurement of surface roughness, its sensitivity can be enhanced in case of using the principle of “amplification of multi-reflection optical path difference”. Therefore two types of the high sensitivity interferometers are made for the purpose of measuring a more precise finishing surface. One is moire-fringe observation type microinterferometer which can decrease “walk-off” for special phenomena of multi-reflection, the other is multiple-beam high sensitivity microinterferometer which can raise “reading accuracy” by sharpening the fringe in addition to high sensitivity. In these two methods, it is experimentally assured to obtain some times (4-5 times in this experiment) sensitivity compared with the conventional types, and it becomes possible to measure a finer precision surface.
