Abstract
This paper deals with the tilt angle control, based on the tool oscillation and the effect of tool oscillation for curved surface polishing. The results are as follous. (1) The tilt angle of polished surface can be detected in polishing process from the relationship between tool oscillation and the displacement of a detecting shaft by using the oscillated polishing head. (2) The curved surface is kept horizontal or at a constant tilt angle in polishing process by controlling a tilting table using a detecting signal from the polishing head. (3) The surface quality polished by a orcillated polishing head is superior to that by a polishing head without oscillation, because tool contact area become wider when tool is oscillated.