Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
State of the Art of Surface Modification Processing
Nobuo YASUNAGA, Toshiyuki MIYAZAKI, Shojiro MIYAKE
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Keywords: surface modification, dry process, CVD, PVD, diffusion, structure control, diamond film, cBN film
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1987 Volume 53 Issue 10 Pages 1503-1506

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