Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Fabrication and Evaluation of X-ray Masks
Hisatake SANO
Author information
Keywords: X-ray mask, membrane, absorber, patterning, mask flatness, mask distortion
JOURNAL FREE ACCESS

1987 Volume 53 Issue 11 Pages 1672-1676

Details
Download PDF (4559K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© by The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Journal of the Japan Society of Precision Engineering

Journal of the Japan Society for Precision Engineering, Contributed Papers

Share this page
feedback
 Top