Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Photo Processing by Excimer Laser
Masataka MURAHARA
Author information
Keywords: excimer laser, laser CVD, photo chemistry, ultraviolet rays, photo processing, photodissociation, semiconductor, silicon film, binding energy, photon energy
JOURNAL FREE ACCESS

1987 Volume 53 Issue 11 Pages 1692-1696

Details
Download PDF (752K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© by The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Journal of the Japan Society of Precision Engineering

Journal of the Japan Society for Precision Engineering, Contributed Papers

Share this page
feedback
 Top