Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
STM Applications for Microelectronics
Shigeo OKAYAMA, Masanori KOMURO, Makoto OKANO
Author information
Keywords: STM, metal-stack vibration isolator, electrochemically etched tip, piezo actuator, microfabrication pattern, focused ion beam, grating, compact disk stamper
JOURNAL FREE ACCESS

1987 Volume 53 Issue 12 Pages 1826-1830

Details
Download PDF (1101K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© by The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Journal of the Japan Society of Precision Engineering

Journal of the Japan Society for Precision Engineering, Contributed Papers

Share this page
feedback
 Top