Abstract
Single-point diamonds are used to scratch the surfaces of HP-Al2O3, HP-Si3N4 and S-SiC. When depth of cut is about 2μm, the diamond tips are worn by either the single-plane or the double-plane or the microfracture type. The wear rate of S-SiC is the highest and then HP-Si3N4 and HP-Al2O3 in turn. When depth of cut is larger than 2, um, the adhesion is remarkably severe. The adhered layer has a tendency to become thinner as the scratching speed increases. It exhibits swelling and partly flaking repeatedly in the scratching process.