Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Laser Atomic Layer Epitaxy
Yoshinobu AOYAGI
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Keywords: laser atomic layer epitaxy, GaAs, site selective decomposition, trimethyl gallium, ultra fine fabrication, photo-surface decomposition, Ar ion laser, patterned crystal growth, surface coverage
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1988 Volume 54 Issue 4 Pages 674-678

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[in Japanese]
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© by The Japan Society for Precision Engineering
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