Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
High Resolution Piezoelectric Actuator for STM
Shigeo OKAYAMA, Koji KAJIMURA, Shinji WATANABE, Akihiko HONMA
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Keywords: piezoelectric actuator, STM (scanning tunneling microscope), SEM (scanning electron microscope), charge control
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1988 Volume 54 Issue 5 Pages 817-821

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[in Japanese]
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© by The Japan Society for Precision Engineering
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