Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Active Control Technique for Fine Vibration Isolation Systems and its Application
Keiichi TAKAYAMA
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Keywords: vibration isolation system, active control, transmissibility, vibration efficiency, resonance, passive, active, precision equipment, shock response, STM, stepper, semiconductor
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1989 Volume 55 Issue 12 Pages 2107-2112

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