A Six-Degrees-of-Freedom Fine Motion Mechanism

Abstract

A six degrees-of-freedom (DOF) mechanism is introduced to drive an object (or a table) precisely in directions of x, y and z-axes and around them; three rectangular linear motions and three rotary ones. In the mechanism, the object is driven by six linear actuators surrounding it. Positions and orientations of the actuators are theoretically discussed, which gives the same dynamic characteristics to the six motions and eliminates interferences between the dynamic motions as well as the static ones. As a result of the discussion, a new type six DOF mechanism is designed. Then an experimental mechanism is introduced in which a 70×70×70mm³ cube object is driven by six PZT actuators. Some static and dynamic experiments prove that the mechanism has the designed characteristics.