Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Pit Growth during Tunnel Etching of Aluminum Foil for Electrolytic Capacitors
Eiji MAKINOTakao YAJIMAEiichi SUGANUMA
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1989 Volume 55 Issue 9 Pages 1633-1638

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Abstract

The dissolution behavior on the tip and on the wall of tunnel pits formed on aluminum during DC etching in hot HCl solutions was studied. Initiated pits grow into a tunnel by crystallographic and auto-catalytic dissolution on the tip, independent of both the pH and the chloride ion concentration of a bulk solution. The tip dissolution proceeds under diffusion control at a rate of several μm/s, and then the tunnel growth abruptly stops at a limiting length when the tunnel tip may be repassivated. Although the tunnel walls must be passive during etching, they are subjected to general dissolution because of a high etching temperature. The tunnel widths increase continuously at a rate of several nm/s and the square cross section of the tunnels changes to circular shape.

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