Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Oblique Incidence Intefferometer Using HOE
Kenzi YASUDA
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Keywords: HOE (Holographic Optical Element), oblique incidence interferometer, diffraction grating, laser interferometer, flatness tester
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1990 Volume 56 Issue 10 Pages 1788-1790

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