Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
The Progress in the Construction of Ruling Engine
Koshi TAKASHIMA
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Keywords: ruling engine, diffraction grating, nanometer positioning, interferomentry, precision engineering, servo drive
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1991 Volume 57 Issue 10 Pages 1740-1743

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