Abstract
On the one-dimensional table unit driven by a friction drive using a position feedback control, it was reported in the 2nd and 3rd reports that the slip between the driving pinion roller and the slider made the settling time long. Therefore, in order to obtain a shorter settling time, a counterplan using a kind of feedback control for the velocity control is considered by decreasing the slip between them. The following results can be obtained for a 24 mm step response in the PTP method : (1) The mean settling time in 100 positioning trials is 299 ms when the table of 15.7 kg reaches the range of ±1 μm of the desired position, and this time is 100-200 ms shorter than that of the previous results. (2) A positioning accuracy is surely within ± 0.158 μm of the desired position (0.158 μm = the resolution of the laser measuring system).
