Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Micronization of Actuators
Toshiro HIGUCHI
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Keywords: actuator, micro motor, electrostatic force, artificial muscle, micro tribology
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1991 Volume 57 Issue 12 Pages 2105-2108

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