Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Ultra Clean Technology for Semiconductor Manufacturing
Tadahiro OHMI, Tadashi SHIBATA
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Keywords: ultra clean technology, ultra large scale integration, silicon devices, ultra high vacuum, turbo molecular pump, gate valve, ultra clean surface
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1991 Volume 57 Issue 9 Pages 1531-1535

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