Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Clean Room for ULSI Production Line
Hiroyuki HARADA
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Keywords: ULPA filter, HEPA filter, particulate contamination, ULSI, clean technology, job-shop LSI production line, class, depth filter, lamina flow clean room, clean room temperature
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1992 Volume 58 Issue 2 Pages 198-201

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