Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Silicon Technology for ULSI Devices
Nobuyuki AKIYAMA, Mitsuo KOHNO
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Keywords: silicon crystal, micro defect, gettering, impurity, flatness
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1992 Volume 58 Issue 2 Pages 211-214

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