Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Planning of Clean Rooms
Toshio INOUE
Author information
Keywords: clean room, cleanliness class, CVD (chemical vapor deposition), DRAM (dynamic random access memory), air shower, vertical laminar air flow system, turbulent air flow system, pass box, amenity
JOURNAL FREE ACCESS

1992 Volume 58 Issue 2 Pages 241-246

Details
Download PDF (1023K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© by The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Journal of the Japan Society of Precision Engineering

Journal of the Japan Society for Precision Engineering, Contributed Papers

Share this page
feedback
 Top