Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Theoretical Studies on the Surface Reactions of VPE
Toshikazu TAKADA
Author information
Keywords: vapor chase enitaxv, Si thin film, GaAs, atomic layer eoitaxy, surface reaction, molecular orbital calculation
JOURNAL FREE ACCESS

1993 Volume 59 Issue 6 Pages 891-896

Details
Download PDF (3393K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© by The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Journal of the Japan Society of Precision Engineering

Journal of the Japan Society for Precision Engineering, Contributed Papers

Share this page
feedback
 Top