Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Microactuators Using Magnetostrictive Thin-films
Ken Ichi ARAI, Takashi HONDA
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Keywords: micromachine, microactuator, magnetostriction, amorphous terbium-iron thin film, amorphous samarium-iron thin film, magnetostrictive cantilever actuator, traveling machine
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1994 Volume 60 Issue 12 Pages 1699-1702

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