Abstract
A three-dimensional laser profile processing system with focusing control of linear shaped beam of uniform power density has been developed. In the system, YAG laser beam is focused through a shaping mask, cylindrical lens and convex lens so that the power density is uniform on the target material. Experimental relationships between the defocusing distance and processed depth are obtained. The system is operated due to the data of the model profile obtained by an optical position sensor. It was applied to generate a profile of saw blade in Si3N4 ceramics. Although the accuracy of generated profile is not high, it can be made higher by the improvement in sensing system of the model and controlling speed of the lens system in the direction of z-axis.
