Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Displacement Sensor and Ultra-precision Positioning
Akira SHIMOKOHBE, Kaiji SATO
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Keywords: positioning, sensor resolution, positioning resolution, sensor noise, low pass filter, dynamics, optimal control
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1995 Volume 61 Issue 12 Pages 1661-1665

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