Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
New Stage System for Step-and-Repeat Scanning Stepper
Susumu MAKINOUCHI, Yutaka HAYASHI, Saburo KAMIYA
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Keywords: stage, stepper, scanning, synchronization, photo-lithography
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1995 Volume 61 Issue 12 Pages 1676-1680

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