Abstract
This paper describes piezoelectricity of PZT films and their application to impact energy sensor. Perovskite-type PZT (Pb (Zr0.54Ti0.46) O3) films were prepared by annealing pyrochlore-type lead zirconate titanate films, fabricated by an ion beam sputtering method. Piezoelectricity was evaluated by investigating the relation between the maximum output voltage (Vmax) which was generated by falling ball impact test, and the height (h) of the ball release point. As a result, it is made clear that the voltage output coefficient of the film is two digit less than that of the sintered one. But it is also found that Vmax is proportional to h3/5. This means that the value Vmax is proportional to the 3/5 power of the value of potential energy, that is, kinetic energy of the ball. And that the relation between Vmax and kinetic energy is the same tendency as that of the sintered piezoelectric elements. This relation suggests that the PZT film is applicable to the sensor to measure kinetic energy by impact on it.
