Abstract
The measurement of errors in the axis of rotation is of growing interest, because spindle is the most important part of ultra-precision machine tool and precision measuring instrument. In most of the measuring methods for precision spindle, capacitive type displacement transducers are used to measure relative displacement between spindle and transducers. However, the electrical noise due to NC controller or spindle motor affect accuracy of these measuring methods. In an attempt to reduce electrical noise and to increase the accuracy, an optical spindle error analyzer has been developed. At first, principle of the measuring method and optical system layout are described in detail. Then, the result of the consideration on measuring sensitivity is shown.
