Growth of Optical Transparent CVD Diamond Thin Plate

Abstract

Deposition conditions and growth of CVD diamond thin plate that has high optical transparency have been studied. Transparent CVD diamond thin plates have been deposited at lower methane concentration of 0.6% independent of the difference of nucleation using arc discharge plasma jet CVD. The relation between the structural properties and optical performance of CVD diamond has been discussed by observation of its cross sectional structure. The cross sectional structure of CVD diamond thin plates was exposed by the techniques of the polishing and etching using a hot iron plate and hydrogen plasma, respectively. As a result, transparent CVD diamond plates grow in well-arranged way with less defects and impurities.