Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Piezoelectric Force Sensor for Scanning Force Microscopy (SFM)
Tadatomo SUGA, Toshihiro ITOH
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Keywords: scanning force microscopy, atomic force microscopy, piezoelectric, micromachining, sensor, force sensor, PZT, ZnO
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1996 Volume 62 Issue 3 Pages 345-350

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