1996 Volume 62 Issue 3 Pages 403-407
A new type of angle sensor with three tracking STM tips is presented. Using the three tracking STM tips, our proposed idea can offer a real-time measurement of three angles, that is, pitch, roll and yaw with nanoradian resolution. Analytical error evaluation is conducted to predict the performances, such as 1 nanoradian resolution, 1 ×10-3 radian stroke of pitch and roll, and 2 × 10-3 radian stroke of yaw. In addition, the fundamental experiment with two STM tips to measure pitch (roll) is carried out in order to make sure the feasibility of the angle sensor. Nanoradian order pitch has been measured.