Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Angle Sensor with STM (1st Report)
-Error Analysis and Pitch Measurement with Two STM Tips-
Shigeru SAKUTAKamal Youcef TOUMI
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1996 Volume 62 Issue 3 Pages 403-407

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Abstract

A new type of angle sensor with three tracking STM tips is presented. Using the three tracking STM tips, our proposed idea can offer a real-time measurement of three angles, that is, pitch, roll and yaw with nanoradian resolution. Analytical error evaluation is conducted to predict the performances, such as 1 nanoradian resolution, 1 ×10-3 radian stroke of pitch and roll, and 2 × 10-3 radian stroke of yaw. In addition, the fundamental experiment with two STM tips to measure pitch (roll) is carried out in order to make sure the feasibility of the angle sensor. Nanoradian order pitch has been measured.

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