Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Complexity and Precision in Measurement
Yoshihisa TANIMURA
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Keywords: measurement, precision, complexity, laser interferometer, error factors, reliability, fine movement stage, linewidth, optical constants, standard scale
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1996 Volume 62 Issue 8 Pages 1096-1100

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[in Japanese]
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© by The Japan Society for Precision Engineering
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