Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Vibration Measurement and Analysis for Micro-mechanisms
Takashi USUDA
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Keywords: micro-mechanism, vibration measurement, vibration analysis, noncontact measurement, interferometry, optical probe
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1997 Volume 63 Issue 3 Pages 332-336

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