Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Recent Tendency of Precision and Ultraorecision Positioning
Jiro OTSUKA, Keiichiro SAKATO, Osamu HORIUCHI, Akira KYUSOLJIN
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Keywords: precision positioning, ultraprecision positioning, technical committee activity, lithography, linear motor, piezo actuator, research activity obstacle
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1997 Volume 63 Issue 6 Pages 762-766

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