Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Electrical Discharge Machining of Monocrystalline Silicon
Yoshiyuki UNO, Akira OKADA, Yasuhiro OKAMOTO
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Keywords: electrical discharge machining, monocrystalline silicon, high resistivity, Joule's heating, high aspect ratio boring, fine complicated hole, triangular section electrode, silicon ingot slicing
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1998 Volume 64 Issue 12 Pages 1739-1742

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