Abstract
For the progress of micromachine technology and microfabrication technology, it is necessary to devise a technique to measure both profile and dimension of microparts. Although some researches on measuring methods of a small hole are reported, measuring methods for the profile and dimension of microparts including geometrical deviations such as straightness, circularity and perpendicularity has not been reported yet. It is thought that a small three dimensional profile measuring apparatus with microprobe can be utilized as the measuring method for this purpose. In this paper a new three dimensional profile measuring apparatus which has non-contact probe detecting proximity to measuring object through tunneling effect is described in detail. Then the validity of the measuring apparatus is shown by several experimental results.
