Abstract
This paper describes a revolutionary new deposition process by using micro electrical discharge machining (micro EDM) to fabricate highly complex 3-dimensional microstructures without special material or machining fluid. Steel or aluminum alloy is used for both the tool electrode (diameter 0.1mm) and the workpiece, and the EDM process is carried out in air or nitrogen gas. The suitable discharge conditions for this EDM deposition process are predicted from the transient temperature analysis of the tool electrode and the workpiece. In this analysis the energy distributions in the tool electrode and the workpiece which depend on the material combination of the electrode and workpiece and polarity are considered. The experimental results show that micro rod 0.14mm in diameter and 2.2mm in height is formed on the workpiece surface when the polarity of the tool electrode is positive. The deposition process is realized whether the tool electrode material is the same as that of the workpiece or not. It is also found that the deposition process can easily be switched to the removal process by changing only the polarity of the tool electrode.
