Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Tribology and Applications of DLC and cBN Films
Shojiro MIYAKE
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Keywords: diamond like carbon, cubic boron nitride, atomic force microscope, tribology, multilayered film, super hard film, nanoprocessing, protective film
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2000 Volume 66 Issue 4 Pages 539-543

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