Bilateral Servo Mechanisms with Piezoelectric Actuator in Slave Side

Abstract

Micromanipulator technologies have been developed in various fields such as micromachine production, medical operation and so on. In these fields it is necessary to obtain not only micro displacement information but also sensitivity to minute reactional forces. Hysteresis linearization on piezoelectric actuator is achieved by the computer control, including turns at arbitrary points.The compensation method for the transmission error is assumed to be effective also in case that different type manipulators are used on each side.