Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Prospect of Micro Actuators
Toshiro HIGUCHI
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Keywords: actuator, MEMS, nano technology, micro motors, artificial muscle, micro tribology
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2002 Volume 68 Issue 5 Pages 629-632

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